Mechanical Properties of Copper Films
- 1 January 1970
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 41 (1), 402-406
- https://doi.org/10.1063/1.1658355
Abstract
The mechanical properties of polycrystalline copper films, 700–5000‐Å thick, were measured using the bulge technique. The breaking strength increased with decreasing film thickness, the greatest increase occurring below 1000 Å. The equivalent bulk breaking strength was found to be 61 000 lb/in2. Young's modulus was independent of film thickness and had the normal value 18×106 lb/in2.Keywords
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