A Silicon-Based Shape Memory Alloy Microvalve
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Microfabricated actuator with moving permanent magnetPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- Electrically-activated, micromachined diaphragm valvesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Variable-flow microvalve structure fabricated with silicon fusion bondingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- MICROMINIATURE FLUIDIC AMPLIFIERPublished by Transducer Research Foundation Inc. (TRF) ,1986