A highly sensitive and low‐noise IR photosensor based on a‐SiGe as a sensing and noise filter: Toward large‐sized touch‐screen LCD panels

Abstract
Abstract— The a‐SiGe TFT photosensor for embedded touch‐screen panels (TSPs) was characterized by comparison with an a‐Si sensor. The photoresponse of an a‐SiGe sensor at a 850‐nm wavelength was much higher than that of a‐Si, indicating that a‐SiGe is a strong candidate material for an IR sensor. In order to increase the signal‐to‐noise ratio, the incident visible light was filtered by incorporating a bandpass‐filter layer. An a‐SiGe IR‐sensor‐embedded LCD panel was successfully demonstrated, showing an excellent multitouch property independent of ambient‐light conditions. This technology can be widely used in multifunctional TSPs.