Micromachined Array Studies of Tin Oxide Films: Nucleation, Structure and Gas Sensing Characteristics
- 1 January 1999
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Selected-area deposition of multiple active films for conductometric microsensor arraysSensors and Actuators B: Chemical, 1996
- SensorsPublished by Wiley ,1995
- Chemical Sensing with Solid State DevicesPublished by Elsevier ,1989