Stress Measurements in Thin Films Deposited on Single Crystal Substrates Through X-ray Topography Techniques
- 1 January 1977
- book chapter
- Published by Springer Nature
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Calculated elastic constants for stress problems associated with semiconductor devicesJournal of Applied Physics, 1973
- X-Ray Stress Topography of Thin Films on Germanium and SiliconJournal of Applied Physics, 1968
- Measurement of Strains at Si-SiO2 InterfaceJournal of Applied Physics, 1966