Single-mode waveguide microlenses and microlens arrays fabrication in LiNbO3 using titanium indiffused proton exchange technique

Abstract

Single‐mode planar waveguide microlenses and microlens arrays in LiNbO₃ have been fabricated using a combination of titanium diffusion and proton exchange processes. The lenses have demonstrated properties such as very short focal length, micron focal spot size, and large angular field of view that are desirable for applications in integrated and fiber‐optic signal processing and computing as well as communication systems.