Beam annealing of semiconductor materials
- 1 January 1984
- journal article
- Published by IOP Publishing in Physics in Technology
- Vol. 15 (1), 23-29
- https://doi.org/10.1088/0305-4624/15/1/i04
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Short Time AnnealingJournal of the Electrochemical Society, 1983
- Transient annealing of ion implanted GaAsMicroelectronics Journal, 1982