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Recombination at the silicon nitride/silicon interface
Home
Publications
Recombination at the silicon nitride/silicon interface
Recombination at the silicon nitride/silicon interface
JE
J. R. Elmiger
J. R. Elmiger
RS
R. Schieck
R. Schieck
MK
M. Kunst
M. Kunst
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1 July 1997
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 15
(4)
,
2418-2425
https://doi.org/10.1116/1.580757
Abstract
No abstract available
Keywords
SINX/SI
CM2
ΔNB
INTERFACE DEFECT DENSITY
EXCESS CARRIER CONCENTRATION
DIFFERENTIAL
Cited by 43 articles