Ion resist properties of thin films of transition metal oxides
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1), 736-738
- https://doi.org/10.1016/0168-583x(89)90886-0
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Observation of an Insulator-Metal Transition with Na+-Irradiated Amorphous MoO3 FilmsJapanese Journal of Applied Physics, 1987
- Mechanism of a High-Contrast Inorganic Ion Resist Using Amorphous WO3Japanese Journal of Applied Physics, 1986
- Ion-Beam Modification of Amorphous WO3 Film and Its Properties as a High-Contrast Inorganic Ion ResistJapanese Journal of Applied Physics, 1985
- Ion beam exposure characteristics of resists: Experimental resultsJournal of Applied Physics, 1982
- Radiation damage in crystalline insulators, oxides and ceramic nuclear fuelsRadiation Effects, 1982
- Criteria for bombardment-induced structural changes in non-metallic solidsRadiation Effects, 1975