Micromechanical accelerometer integrated with MOS detection circuitry
- 1 January 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 29 (1), 23-27
- https://doi.org/10.1109/t-ed.1982.20653
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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