New Method for the Detection of Atomic Oxygen Beams
- 1 April 1971
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 54 (7), 3022-3025
- https://doi.org/10.1063/1.1675288
Abstract
Atomic oxygen adsorbed on ZnO single crystals causes a decrease of surface conductivity. This fact is used to measure the flux density of atomic oxygen. With a detector surface of 0.3 mm2 the lower limit of detection is 1 × 1011 atoms sec−1·cm−2.Keywords
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