Thickness measurements of films on transparent substrates by photoelectric detection of interference fringes
- 1 January 1974
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 45 (1), 14-15
- https://doi.org/10.1063/1.1686436
Abstract
Apparatus for epitaxial film thickness measurement by photoelectric detection of interference fringes is described. The apparatus features high speed, immunity to noise from ambient light and the ability to distinguish between films grown on opposite sides of a transparent substrate, and is implemented with a minimum of components.Keywords
This publication has 3 references indexed in Scilit:
- Technique for controlling the properties of magnetic garnet filmsIEEE Transactions on Magnetics, 1973
- Refractive index behavior of garnetsJournal of Applied Physics, 1973
- Characterization of the Magnetic Behavior of Bubble DomainsPublished by AIP Publishing ,1973