Fabrication of microelectron gun arrays using laser micromachining
- 31 March 1998
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 41-42, 167-170
- https://doi.org/10.1016/s0167-9317(98)00037-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Experimental evaluation of a 20×20 mm footprint microcolumnJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Electron-beam microcolumns for lithography and related applicationsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Physical properties of thin-film field emission cathodes with molybdenum conesJournal of Applied Physics, 1976