Anisotropy of Inversion Channel Mobility in 4H- and 6H-SiC MOSFETs on (11-20) Face
- 10 May 2000
- journal article
- Published by Trans Tech Publications, Ltd. in Materials Science Forum
- Vol. 338-342, 1105-1108
- https://doi.org/10.4028/www.scientific.net/msf.338-342.1105