Abstract
The selective generation of characteristic X-rays during heavy ion bombardment of solids is briefly described. The principles can be understood in terms of the Fano-Lichten model, which postulates that during heavy ion collisions, interactions occur between the electronic systems of the target and projectile atoms, leading to electron promotions and consequent inner shell vacancies. The resultant X-rays have the advantage of being essentially free from the continuous background radiation which accompanies X-rays produced by electron bombardment. It is shown how the characteristic X-rays of certain elements may be generated in a selective manner by bombardment with an appropriate heavy ion of optimum energy. The resultant technique is particularly applicable to the analysis of elements located on or near to surfaces, and may therefore be used for the elucidation of distribution profiles of ion-implanted elements.