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Ion bombardment and titanium film growth on polyimide
Home
Publications
Ion bombardment and titanium film growth on polyimide
Ion bombardment and titanium film growth on polyimide
PB
P. Bodö
P. Bodö
JS
J.‐E. Sundgren
J.‐E. Sundgren
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1 July 1988
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 6
(4)
,
2396-2402
https://doi.org/10.1116/1.575562
Abstract
No abstract available
Keywords
ION BOMBARDMENT
TITANIUM FILM
POLYIMIDE
FILM GROWTH
BOMBARDMENT AND TITANIUM
Cited by 29 articles