New experimental evidence of the periodic surface structure in laser annealing

Abstract

This letter presents a study of the nature of the periodic structure observed on the edge of laser‐annealed spots on ion‐implanted silicon. The direction of the periodic fringes was always found to be about perpendicular to the E vector of the light for linearly polarized beams. No fringe pattern was observed for circular polarization. We suggest that the pattern observed is due to heating by a standing wave resulting from the interference of the impinging wave and a radial (longitudinal) scattered wave.