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Oxynitride Glasses and Silicon Nitride Processing
Home
Publications
Oxynitride Glasses and Silicon Nitride Processing
Oxynitride Glasses and Silicon Nitride Processing
RL
R. E. Loehman
R. E. Loehman
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1 January 1982
book chapter
Published by
Wiley
p.
35-49
https://doi.org/10.1002/9780470318140.ch4
Abstract
No abstract available
Keywords
AMORPHOUS
OXYNITRIDE
NITROGEN
ATMOSPHERE
EQUILIBRIUM
Cited by 5 articles