Infrared light scattering tomography with an electrical streak camera for characterization of semiconductor crystals

Publisher Website

1 June 1986

journal article
Published by AIP Publishing in Review of Scientific Instruments

Vol. 57 (6), 1135-1139
https://doi.org/10.1063/1.1138670

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Observation of Lattice Defects in GaAs and Heat-treated Si Crystals by Infrared Light Scattering Tomography
Japanese Journal of Applied Physics, 1983
Detection of plate-like defects by light-scattering tomography
Philosophical Magazine A, 1981

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