Slide film damping in laterally driven microstructures
- 31 January 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 40 (1), 31-39
- https://doi.org/10.1016/0924-4247(94)85027-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990
- Resonant-structure Micromotors: Historical Perspective and AnalysisSensors and Actuators, 1989
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Miniaturization of Tuning ForksScience, 1968
- The resonant gate transistorIEEE Transactions on Electron Devices, 1967