Thermal-wave microscopy with electron beams
- 1 July 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 37 (1), 98-100
- https://doi.org/10.1063/1.91718
Abstract
We have performed high‐resolution thermal‐wave microscopy of surface and subsurface features of an opaque solid using, for the first time, electron beams to generate the signal.Keywords
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