Defect creation and hydrogen evolution in amorphous Si:H
- 29 February 1980
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 35-36, 285-290
- https://doi.org/10.1016/0022-3093(80)90608-0
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- A SIMS analysis of deuterium diffusion in hydrogenated amorphous siliconApplied Physics Letters, 1978
- Hydrogen bonding in silicon-hydrogen alloysPhilosophical Magazine Part B, 1978
- Hydrogen evolution from plasma-deposited amorphous silicon filmsJournal of Vacuum Science and Technology, 1978
- Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputteringPhysical Review B, 1977
- Quantitative analysis of hydrogen in glow discharge amorphous siliconApplied Physics Letters, 1977