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Phosphorus Diffusion into Silicon under the Condition of Controlled Surface Concentration
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Publications
Phosphorus Diffusion into Silicon under the Condition of Controlled Surface Concentration
Phosphorus Diffusion into Silicon under the Condition of Controlled Surface Concentration
SM
Satoru Matsumoto
Satoru Matsumoto
TN
Tatsuya Niimi
Tatsuya Niimi
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1 November 1976
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 15
(11)
,
2077-2082
https://doi.org/10.1143/jjap.15.2077
Abstract
No abstract available
Keywords
PHOSPHORUS DIFFUSION
DIFFUSION INTO SILICON
CONTROLLED SURFACE CONCENTRATION
CONDITION OF CONTROLLED
Cited by 15 articles