Growth of Uniaxial Magnetic Garnet Films by a Simplified Method of Chemical Vapor Deposition

Abstract

Epitaxialfilms of gallium‐substituted yttriumirongarnet displaying magnetic domains have been grown on gadoliniumgalliumgarnet and mixed gadolinium dysprosium galliumgarnet substrates. The filmsgrown on Dy: GGG were crack‐free. A chemical‐vapor‐deposition (CVD) system using metal source materials and a simplified geometry was developed. Investigations were made of several different types of growth which occurred and of the efficiency of HCl transport. Results of these studies, as well as magnetic properties of the films and a description of the CVD system and growth conditions, are presented.