Laser direct-write metallization in thin palladium acetate films
- 15 February 1987
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (4), 1628-1632
- https://doi.org/10.1063/1.338049
Abstract
Micron-scale palladium lines have been produced by a photothermal laser direct-write process in thin palladium acetate films. The range of observed structures relates to the complex thermal profiles generated by coupling of the incident laser radiation with the exothermic heat of reaction. Surprisingly, the chemical composition of these features does not vary significantly as a function of laser power and scan speed. Rather, deviation of the electrical resistivities of these features from that of pure palladium results from porosity in the lines.Keywords
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