Integrated optical photodetector

Abstract

An optoelectronically integrated photodetector has been realized, consisting of an optical waveguide structure (SiO₂‐glass) fabricated on an electrically active substrate (Si) containing a photodetector. Light is coupled into the waveguide structure by means of a grating coupler and is guided into the detector element. A coupling efficiency of 80% between the waveguide and detector structure at 6328 Å has been measured.