Design and dextrous control of micromanipulator with 6 DOF

Abstract
A six-degree-of-freedom micromanipulator using PZT actuators has been designed and tested. The micromanipulator is very small and light, because it is made of PZT actuators. Since this micromanipulator has a position and force feedback system, it can control desired poses and forces. Since the manipulator has 6 degrees of freedom, its tip can move along three axes, and can also rotate along each axis. A fuzzy-like variable gain feedback control system is employed, making this system perform better than the fixed gain feedback system. These technical merits will make it possible to operate this dextrous micromanipulator in much more complicated environments under a microscope.

This publication has 2 references indexed in Scilit: