A cold-cathode Penning-type ion source with axial extraction has been developed to provide the milliampere ion currents needed for high volume, high throughput ion implantation. For solid feed material, the source is fitted with an oven that is concentric with the anode. The oven windings heat the anode to prevent condensation of feed vapor in the source. The ion beam is extracted through a three-element electrode assembly which provides lens action. The optical effect of space-charge forces completes beam formation. The output consists of up to 12 mA ion current in the form of a beam that is parallel to better than 10 mR and of diameter less than 2.5 cm. The beam contains 15% boron, 30% phosphorus, 50% arsenic when the source is run on BF3, 10% PH3, or solid arsenic. The source allows analyzed currents in the 1–3-mA range to be produced for periods of about 40 h.