Krypton entrapment in continuous-biased sputter-deposited glassy metals
- 15 October 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 63 (1), 137-141
- https://doi.org/10.1016/0040-6090(79)90114-7
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Krypton entrapment in pulse-biased sputter-deposited metalsThin Solid Films, 1978
- Incorporation of rare gases in sputtered amorphous metal filmsJournal of Vacuum Science and Technology, 1977