Thickness change in an annealed amorphous silicon film detected by spectroscopic ellipsometry
- 1 June 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 279 (1-2), 174-179
- https://doi.org/10.1016/0040-6090(95)08169-0
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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