Detection and origins of crystal defects in GaAs/GaAlAs LPE layers
- 1 October 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (10), 4349-4352
- https://doi.org/10.1063/1.322437
Abstract
We report the discovery that shallow growth pits develop on the surfaces of GaAs/GaAlAs double‐heterostructure wafers prepared by liquid phase epitaxy where the surfaces are intersected by crystal defects. The growth pits enable nondestructive defect characterization of such wafers to be made by optical microscopy. It is found that pits due to stacking faults are more readily detected than pits due to undissociated dislocations. The results of a search for the origins of the defects in the material are also presented. Characteristic ’’star’’ patterns develop when the material is etched. TEM observations show that these are due to clusters of crystal defects which originate at inclusions buried in the grown material.Keywords
This publication has 14 references indexed in Scilit:
- A phenomenological study of meniscus lines on the surfaces of GaAs layers grown by LPEJournal of Crystal Growth, 1975
- Defect structure of degraded heterojunction GaAlAs−GaAs lasersApplied Physics Letters, 1975
- Simple Theoretical Estimates of the Schottky Constants and Virtual‐Enthalpies of Single Vacancy Formation in Zinc‐Blende and Wurtzite Type SemiconductorsJournal of the Electrochemical Society, 1975
- Stress relief in magnetic garnet films grown by liquid phase epitaxyJournal of Crystal Growth, 1974
- Stress relief in magnetic garnet films grown by liquid phase epitaxyJournal of Crystal Growth, 1974
- Defect structure introduced during operation of heterojunction GaAs lasersApplied Physics Letters, 1973
- Etch Pit Studies of GaP Liquid Phase Epitaxial LayersJournal of the Electrochemical Society, 1973
- The liquid phase epitaxy of AlxGa1-xAs for monolithic planar structuresProceedings of the IEEE, 1971
- Twins and stacking faults in vapor grown GaAsJournal of Physics and Chemistry of Solids, 1967
- Theory of Thermal GroovingJournal of Applied Physics, 1957