Heavy ion lithography: A tool for the investigation and replication of microscopic objects
- 30 April 1980
- journal article
- research article
- Published by Elsevier in The International Journal of Applied Radiation and Isotopes
- Vol. 31 (5), 297-305
- https://doi.org/10.1016/0020-708x(80)90037-x
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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- X-Ray Lithography: A Complementary Technique to Electron Beam LithographyJournal of Vacuum Science and Technology, 1973
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- Alpha radiography with plastic track detectorsThe International Journal of Applied Radiation and Isotopes, 1971
- Range and stopping-power tables for heavy ionsAtomic Data and Nuclear Data Tables, 1970
- Solid-State Track Detectors: Applications to Nuclear Science and GeophysicsAnnual Review of Nuclear Science, 1965