Empirical method of calibrating a 4-point microarray for measuring thin-film-sheet resistance

Abstract

The calibration of a 4-point probe used for sheet-resistance measurements of a thin-film sample is usually based on the calculation of a correction factor C, depending on the probe and sample dimensions. Based on the Van, der Pauw idea, a method of experimental calibration of the 4-point probe is given, if the probe dimensions are sufficiently small in comparison with the sample.