Niobium nanobridge dc SQUID

Abstract

For the first time high‐resolution electron beam contamination lithography has been used to produce active sensing devices. dc SQUID’s (Superconducting quantum interference devices) with linewidths as small as 30 nm have demonstrated a minimum intrinsic energy resolution of 3h. This is the best value for any SQUID to date and approaches the limit ≈ h set by the uncertainty principle. The dependence of voltage noise on SQUID parameters is in agreement with a new small‐signal model of SQUID noise.