A fast liquid flow sensor with thermal isolation by oxide-filled trenches
- 29 March 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3), 373-379
- https://doi.org/10.1016/0924-4247(94)00924-7
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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