I n s i t u preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputtering

Abstract

Thin superconducting films of YBa₂ Cu₃ O₇ have been prepared by magnetron sputtering from targets of sintered material in an oxygen‐argon atmosphere. The compositional and structural properties were studied by Rutherford backscattering and x‐ray diffraction. The films were deposited at substrate temperatures between 580 and 800 °C. It was found that the material grows in the oxygen deficient tetragonal phase. In situ heat treatment at 430 °C in pure O₂ atmosphere generates the orthorhombic structure and the films on sapphire and SrTiO₃ coated sapphire substrates show the full superconducting transition at 83 K.