Transmission electron microscopy studies of the polycrystalline silicon-SiO2 interface
- 1 June 1983
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 104 (1-2), 153-161
- https://doi.org/10.1016/0040-6090(83)90556-4
Abstract
No abstract availableKeywords
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