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Influence of photoelectrons on the exposure of resists by x rays
Home
Publications
Influence of photoelectrons on the exposure of resists by x rays
Influence of photoelectrons on the exposure of resists by x rays
EH
E. Hundt
E. Hundt
PT
P. Tischer
P. Tischer
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1 May 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(3)
,
1009-1011
https://doi.org/10.1116/1.569724
Abstract
No abstract available
Keywords
INFLUENCE OF PHOTOELECTRONS
X RAYS
EXPOSURE OF RESISTS
RESISTS BY X
Cited by 7 articles