Production of YBa2Cu3O7−y superconducting thin films i n s i t u by high-pressure reactive evaporation and rapid thermal annealing

Abstract

A high‐pressure reactive evaporation process has been used to produce smooth YBa₂Cu₃O_7−y high T_c superconducting films without the necessity of a post‐deposition oven anneal cycle. Augmented in some cases by rapid thermal annealing, the process has yielded films with zero resistance transition temperatures above 80 K, and critical current densities above 10⁶ A/cm² at 4.2 K on both cubic zirconia and SrTiO₃ substrates.