Hunting for a single-source precursor: toward stoichiometry controlled CVD of 13–15 composites
- 31 March 2003
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 47 (3), 543-548
- https://doi.org/10.1016/s0038-1101(02)00410-0
Abstract
No abstract availableKeywords
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