Thermoelectric AC power sensor by CMOS technology
- 1 July 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 13 (7), 366-368
- https://doi.org/10.1109/55.192757
Abstract
The authors report the development of a thermoelectric AC power sensor (thermoconverter) realized by industrial CMOS IC technology in combination with postprocessing micromachining. The sensor is based on a polysilicon heating resistor and a polysilicon/aluminum thermopile integrated on an oxide microbridge. The thermopile sensitivity is 9.9 mV/mW and the burn-out power of the sensor is 50 mW. The time constant is 1.85 ms and the SNR (signal-to-noise ratio) is 8*10/sup 9//W. The linearity error with respect to frequency is less than 0.1% below 400 MHz and less than 1% up to 1.2 GHz.Keywords
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