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Growth of β-silicon carbide on silicon
Home
Publications
Growth of β-silicon carbide on silicon
Growth of β-silicon carbide on silicon
AB
A. S. Brown
A. S. Brown
BW
B. E. Watts
B. E. Watts
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1 June 1970
journal article
Published by
International Union of Crystallography (IUCr)
in
Journal of Applied Crystallography
Vol. 3
(3)
,
172-174
https://doi.org/10.1107/s0021889870005873
Abstract
No abstract available
Keywords
TOPOGRAPHY
SILICON
PARTICULATE
VACUUM
SIC LAYERS
ETHYLENE
INDEX ORIENTATIONS
EPITAXIC GROWTH
Cited by 15 articles