A monolithic capacitive pressure sensor with pulse-period output

Abstract

A new microminiature monolithic capacitive pressure transducer (CPT I) is 20 times more sensitive than piezoresistive strain-gauge pressure transducers, requires one percent of the power, and can be batch fabricated through current integrated circuit technology. A second device (CPT II) incorporates bipolar signal-processing electronics on the same silicon chip to produce a low-duty-cycle pulse-mode output with period related to pressure. This output format helps to re-solve the problem of shunting between leads, which is one of the principal causes of long-term drift in piezoresistive transducers designed for implantable medical applications. Because this device uses capacitance change as a transductional mechanism rather than piezo-resistivity, it is not susceptible to drift caused by temperature variations in the piezoresistive coefficient. Optimization for totally implantable biomedical applications places special emphasis on small size, high sensitivity, improved long-term baseline stability, and greatly reduced power consumption. These properties are also important for a wide range of pressure-sensing applications-from automotive to general industrial use.