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Influence of Residual Gas on the Process of Film Growth
Home
Publications
Influence of Residual Gas on the Process of Film Growth
Influence of Residual Gas on the Process of Film Growth
YN
Yoshikatsu Namba
Yoshikatsu Namba
TM
Toshio Mori
Toshio Mori
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1 January 1973
journal article
Published by
The Vacuum Society of Japan
in
SHINKU
Vol. 16
(3)
,
96-102
https://doi.org/10.3131/jvsj.16.96
Abstract
No abstract available
Keywords
RESIDUAL GAS
FILM GROWTH
INFLUENCE OF RESIDUAL
PROCESS OF FILM
Cited by 4 articles