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Porous silicon: A novel material for microsystems
Home
Publications
Porous silicon: A novel material for microsystems
Porous silicon: A novel material for microsystems
WL
W. Lang
W. Lang
PS
P. Steiner
P. Steiner
HS
H. Sandmaier
H. Sandmaier
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1 October 1995
journal article
Published by
Elsevier
in
Sensors and Actuators A: Physical
Vol. 51
(1)
,
31-36
https://doi.org/10.1016/0924-4247(96)80048-3
Abstract
No abstract available
Keywords
POROUS SILICON
MICROSYSTEMS
Cited by 11 articles