Investigation of 3C-SiC Epitaxial Layers Grown by Sublimation Epitaxy

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10 May 2000

journal article
Published by Trans Tech Publications, Ltd. in Materials Science Forum

Vol. 338-342, 221-224
https://doi.org/10.4028/www.scientific.net/msf.338-342.221

Abstract

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Cited by 15 articles