Control of mechanical and structural properties of coatings deposited using unbalanced magnetrons
- 1 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 59 (1-3), 105-109
- https://doi.org/10.1016/0257-8972(93)90063-t
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- The mechanical and tribological properties of titanium nitride coatings formed in a four magnetron closed-field sputtering systemSurface and Coatings Technology, 1993