An Investigation of the Si(111) 7×7 Surface Structure by RHEED
- 1 July 1980
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 19 (7)
- https://doi.org/10.1143/jjap.19.1277
Abstract
A clean Si(111) surface showing a 7×7 superlattice structure has been investigated in detail by RHEED with changes of azimuthal angle, glancing angle, and surface temperature. For the 7×7 structure, the mean intensity distribution of the reciprocal lattice rods was estimated from the intensity analysis of various RHEED patterns. A Patterson function was calculated using the mean intensity distribution. A new structural model which satisfies the Patterson function has been obtained. This model contains some scattering matter arranged in a regular triangular form with side 2a, a being the size of the substrate unit mesh. The intensity distributions calculated from this model agreed well with that obtained from RHEED and LEED patterns.Keywords
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