Determination of oxygen and nitrogen in tantalum thin films by nuclear techniques and Auger spectroscopy
- 1 May 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 51 (1), L5-L8
- https://doi.org/10.1016/0040-6090(78)90206-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Selected area and in-depth auger analysis of thin filmsThin Solid Films, 1973
- Use of the nuclear reaction 16O(d,α)14N in the microanalysis of oxide surface layersNuclear Instruments and Methods, 1973
- Microanalysis by the direct observation of nuclear reactions using a 2 MeV Van de GraaffNuclear Instruments and Methods, 1971