Debris characteristics of a laser-produced tin plasma for extreme ultraviolet source
- 1 December 2005
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 76 (12)
- https://doi.org/10.1063/1.2136874
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beamsApplied Physics Letters, 2005
- Systematic optimization of the extreme ultraviolet yield from a quasi-mass-limited water-jet targetApplied Physics B Laser and Optics, 2004
- Hot Ion Beam Generation from Rare-Gas Cryogenic TargetsJapanese Journal of Applied Physics, 2004
- Laser-Produced Plasma Light Source Development for Extreme Ultraviolet LithographyJapanese Journal of Applied Physics, 2004
- Plasma Expansion into a VacuumPhysical Review Letters, 2003
- High-efficiency clean EUV plasma source at 10-30 nm, driven by a long-pulse-width excimer laserApplied Physics B Laser and Optics, 2003
- Debris from tape-target irradiated with pulsed YAG laserApplied Surface Science, 2002
- X-ray generation in cryogenic targets irradiated by 1 μm pulse laserApplied Physics Letters, 1998
- Corpuscular diagnostics and processing methods applied in investigations of laser-produced plasma as a source of highly ionized ionsLaser and Particle Beams, 1996
- Conversion efficiencies from laser-produced plasmas in the extreme ultraviolet regimeJournal of Applied Physics, 1996